The IEEE Transactions on Semiconductor Manufacturing is a quarterly peer-reviewed scientific journal published by the IEEE Computer Society. It covers research on semiconductor device fabrication, including simulation and modeling from the factory to the detailed process level, defect control, yield analysis and optimization, production planning and scheduling, environmental issues in semiconductor manufacturing, and manufacturability improvement.

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  • The IEEE Transactions on Semiconductor Manufacturing is a quarterly peer-reviewed scientific journal published by the IEEE Computer Society. It covers research on semiconductor device fabrication, including simulation and modeling from the factory to the detailed process level, defect control, yield analysis and optimization, production planning and scheduling, environmental issues in semiconductor manufacturing, and manufacturability improvement.
abbreviation
  • IEEE Trans. Semicond. Manuf.
academic discipline
first publication year
frequency of publication
  • Quarterly
impact factor
impact factor as of
issn
  • 0894-6507
  • 1558-2345
LCCN
  • 88659341
OCLC
  • 16152423
publisher
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