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A radio frequency microelectromechanical system (RFMEMS) is a microelectromechanical systems with electronic components comprising moving sub-millimeter-sized parts that provide radio frequency functionality. RF functionality can be implemented using a variety of RF technologies. Besides RF MEMS technology, III-V compound semiconductor (GaAs, GaN, InP, InSb), ferrite, ferroelectric, silicon-based semiconductor (RF CMOS, SiC and SiGe), and vacuum tube technology are available to the RF designer.

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  • A radio frequency microelectromechanical system (RFMEMS) is a microelectromechanical systems with electronic components comprising moving sub-millimeter-sized parts that provide radio frequency functionality. RF functionality can be implemented using a variety of RF technologies. Besides RF MEMS technology, III-V compound semiconductor (GaAs, GaN, InP, InSb), ferrite, ferroelectric, silicon-based semiconductor (RF CMOS, SiC and SiGe), and vacuum tube technology are available to the RF designer.
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