About: dbpedia:Microelectromechanical

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Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems and the related micromechatronics) is the technology of very small devices; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology.

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rdfs:comment	Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems and the related micromechatronics) is the technology of very small devices; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology.
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thumbnail	http://commons.wikimedia.org/wiki/Special:FilePath/MEMsfounding.jpg?width=300
is field of	Pratap, Ruda Ali Hasan Nayfeh
is industry of	SVTC Technologies Veeco Instruments Inc. Murata Electronics Oy Sensonor AS Boston Micromachines Corporation Iris AO, Inc.
is product of	Boston Micromachines Corporation Sarcos Incorporated Microvisk Ltd Iris AO, Inc.

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