This HTML5 document contains 1 embedded RDF statements represented using HTML+Microdata notation.
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| Prefix | Namespace IRI |
| rdfs | http://www.w3.org/2000/01/rdf-schema# |
| rdf | http://www.w3.org/1999/02/22-rdf-syntax-ns# |
| xsdh | http://www.w3.org/2001/XMLSchema# |
| dbpedia | http://dbpedia.org/resource/ |
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- dbpedia:Microsystem
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Microsystem is the name commonly used in Europe to describe the same technology which goes under the name MEMS (Micro Electro Mechanical Systems) in the US. In Japan, this field is often termed micromachines.Microsystems are miniaturized (silicon or polymer) devices which perform non-electronic functions: typically sensing and actuation.